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With the support of the Chinese Academy of Sciences and Guangdong Province, the first domestic 48-piece MOCVD prototype developed by the Institute of Semiconductors of the Chinese Academy of Sciences has made significant progress. The test results of a number of third-party organizations indicate that their performance indicators have reached the level of similar international MOCVD equipment products.
It is reported that the prototype not only passed the experimental evaluation of a series of equipment performance indexes such as vacuum, pressure, temperature, rotation and automatic transmission, but also carried out the epitaxial process evaluation of gallium nitride and nitride LED. The epitaxial nitride materials were tested by the domestic mainstream chip companies such as Shandong Huaguang, Hangzhou Silan Mingxin, Wuhan Diyuan, Shanghai Lanbao, Yangzhou Zhongke and other nitride LED chips .
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