Germany AIXTRON pushes large size OLED production equipment

AIXTRON, a well-known German semiconductor deposition equipment provider (Frankfurt: AIXA; NASDAQ: AIXG), has released a new OVPD (Organic Large Area Demonstrator). ), it believes that it has reached an important milestone in process technology. The system has been internally tested in the past few months and has performed well in some cases and is now available for initial customer testing.

AIXTRON's goal is to use OLAD systems to demonstrate customer-related parameters in a production-related environment. To this end, AIXTRON's proprietary core elements specifically designed for the OVPD process have been expanded and optimized for the Generation 8.5 substrate size (2250 mm x 2250 mm) and integrated into a process of size with the Manz Group. In the reaction chamber. AIXTRON also optimized its own source technology STExS (short heat exposure source) to convert precisely measured materials into a gaseous state in a fast, material-saving process based on substrate size and requirements.

Compared to conventional vacuum thermal evaporation (VTE), this source technology can begin gasification in a matter of seconds and stop operating immediately after substrate processing is completed. In view of the fact that a deposition rate of 50 angstroms per second (a/sec) has been achieved, the overall process time is greatly reduced while ensuring that the amount of material consumed is minimized.

The AIXTRON sprinkler technology used in the OVPD process also plays an important role. Unlike vacuum gasification VTE, this technology facilitates the deposition of organic layers based on regionalization. The material flow required in the OVPD process is supplied by STExS source technology. The STExS source operates at an efficient deposition rate of 50 a/sec and can vaporize approximately 40 mg per second. At the same time, the patented design ensures that sensitive and expensive organic materials can be carefully processed in the process.

The company pointed out that from the previous tests, the material utilization rate is much higher than 70%, which is extremely efficient. These results show that the new process has made considerable progress compared to traditional gasification technology, consistent with the goal of significantly reducing O led production costs. At present, the company's display to relevant customers has begun, and O LED manufacturers have been able to use these new process technologies to reduce the production cost of OLEDs.

Martin Goetzeler, CEO of AIXTRON, said: "The current display capabilities of our OLAD display devices are a significant mid-term achievement that will help us achieve efficient OLED production. We are pleased to be able to provide industry customers with this technology. It also shows that the company has the ability to successfully transform complex technologies into mature products."

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